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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12708944
Filing Dt:
02/19/2010
Publication #:
20100304279
Pub Dt:
12/02/2010
Inventors:
Akiko MIMOTOGI, Satoshi Tanaka, Yoko Takekawa, Takamasa Takaki, Katsuyoshi Kodera et al
Title:
MANUFACTURING METHOD OF PHASE SHIFT MASK, CREATING METHOD OF MASK DATA OF PHASE SHIFT MASK, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Assignment: 1
Reel/Frame:
023997/0391Recorded: 02/26/2010Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MIMOTOGI, AKIKO
Exec Dt:
02/08/2010
TANAKA, SATOSHI
Exec Dt:
02/08/2010
TAKAHASHI, MASANORI
Exec Dt:
02/08/2010
TAKEKAWA, YOKO
Exec Dt:
02/09/2010
TAKAKI, TAKAMASA
Exec Dt:
02/09/2010
KODERA, KATSUYOSHI
Exec Dt:
02/09/2010
KAWAGUCHI, HIDEICHI
Exec Dt:
02/12/2010
Assignee:
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU,
TOKYO, JAPAN 105-8001
Correspondent:
FINNEGAN, HENDERSON, FARABOW, GARRETT &
901 NEW YORK AVE., NW
WASHINGTON, DC 20001

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