Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12486565
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Filing Dt:
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06/17/2009
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Publication #:
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Pub Dt:
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12/23/2010
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Inventors:
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Jui-Chun Peng, Heng-Jen Lee, Tung-Li Wu, I-Hsiung Huang
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Title:
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METHOD AND APPARATUS FOR REDUCING DOWN TIME OF A LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD 6 |
| HSIN-CHU, TAIWAN 300-77 |
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| HAYNES AND BOONE, LLP |
| 2323 VICTORY AVENUE |
| SUITE 700 |
| DALLAS, TX 75219 |
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