Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/13/2015
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Application #:
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12456910
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Filing Dt:
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06/24/2009
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Publication #:
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Pub Dt:
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12/30/2010
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Inventors:
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Walter B. Meinel, Kalin V. Lazarov, Brian E. Goodlin
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Title:
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ETCHING CAVITY STRUCTURES IN SILICON UNDER DIELECTRIC MEMBRANE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 655474, M.S. 3999 |
| DALLAS, TEXAS 75265 |
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| JOHN J. PATTI |
| TEXAS INSTRUMENTS INCORPORATED |
| P.O. BOX 655474, M.S. 3999 |
| DALLAS, TEXAS 75265 |
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