Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2011
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Application #:
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12892733
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Filing Dt:
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09/28/2010
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Publication #:
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Pub Dt:
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01/20/2011
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Inventors:
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Marcus Adrianus VAN DE KERKHOF, M'hamed Akhssay, Mamoun El Ouasdad, Asis Uasghiri
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Title:
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Lithographic Apparatus Configured to Compensate for Variations in a Critical Dimension of Projected Features Due to Heating of Optical Elements
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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