Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12867817
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Filing Dt:
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10/29/2010
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Publication #:
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Pub Dt:
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02/24/2011
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Inventors:
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Richard Allen Hogle, Paul Alan Stockman, Partick Helly
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Title:
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RAPID SUPPLY OF FLUORINE SOURCE GAS TO REMOTE PLASMA FOR CHAMBER CLEANING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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575 MOUNTAIN AVENUE |
MURRAY HILL, NEW JERSEY 07974 |
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DAVID A. HEY |
575 MOUNTAIN AVENUE |
INTELLECTUAL PROPERTY DEPARTMENT |
MURRAY HILL, NJ 07974 |
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