Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2013
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Application #:
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12862741
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Filing Dt:
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08/24/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Inventors:
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Kazuyuki Hagiwara, Akira Fujimura
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Title:
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METHOD AND SYSTEM FOR MANUFACTURING A SURFACE USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH VARIABLE BEAM BLUR
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4040 MOORPARK AVENUE, #250 |
SAN JOSE, CALIFORNIA 95117 |
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THE MUELLER LAW OFFICE, P.C. |
12951 HARWICK LANE |
SAN DIEGO, CA 92130 |
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