Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12997183
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Filing Dt:
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01/28/2011
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Publication #:
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Pub Dt:
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05/19/2011
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Inventors:
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Masaki Hirayama, Tadahiro Ohmi
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1-1 KATAHIRA, AOBA-KU, MIYAGI |
| SENDAI-SHI, JAPAN 980-8577 |
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| CANTOR COLBURN LLP |
| 20 CHURCH STREET, 22ND FLOOR |
| HARTFORD, CT 06103 |
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