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Patent Assignment Abstract of Title
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Total Assignments: 5
Patent #:
NONE
Issue Dt:
Application #:
12631117
Filing Dt:
12/04/2009
Publication #:
20110136346
Pub Dt:
06/09/2011
Inventors:
Phillip Geissbühler, Ivan Berry, Armin Huseinovic, Shijian Luo, Aseem Kumar Srivastava et al
Title:
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
Assignment: 1
Reel/Frame:
023606/0328Recorded: 12/04/2009Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
GEISSBUHLER, PHILLIP
Exec Dt:
12/03/2009
BERRY, IVAN
Exec Dt:
12/01/2009
HUSEINOVIC, ARMIN
Exec Dt:
12/03/2009
LUO, SHIJIAN
Exec Dt:
12/01/2009
SRIVASTAVA, ASEEM KUMAR
Exec Dt:
12/02/2009
WALDFRIED, CARLO
Exec Dt:
12/03/2009
Assignee:
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondent:
CANTOR COLBURN LLP
20 CHURCH STREET, 22ND FLOOR
HARTFORD, CT 06103
Assignment: 2
Reel/Frame:
024202/0494Recorded: 04/08/2010Pages: 14
Conveyance:
SECURITY AGREEMENT
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
03/12/2010
Assignee:
SILICON VALLEY BANK
3003 TASMAN DRIVE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
CHRISTOPHER E. KONDRACKI
1501 WILSON BOULEVARD
SUITE 510
ARLINGTON, VA 22209
Assignment: 3
Reel/Frame:
026250/0524Recorded: 05/10/2011Pages: 13
Conveyance:
FIRST AMENDMENT TO SECURITY AGREEMENT
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
04/25/2011
Assignee:
SILICON VALLEY BANK
275 GROVE STREET
SUITE 2-200
NEWTON, MASSACHUSETTS 02466
Correspondent:
CORPORATION SERVICE CO. J. PATERSON
1090 VERMONT AVENUE NW, SUITE 430
WASHINGTON, DC 20005
Assignment: 4
Reel/Frame:
029529/0757Recorded: 12/21/2012Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
12/03/2012
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303
Assignment: 5
Reel/Frame:
030302/0719Recorded: 04/16/2013Pages: 7
Conveyance:
TERMINATION OF SECURITY AGREEMENT
Assignor:
SILICON VALLEY BANK
Exec Dt:
04/11/2013
Assignee:
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01905
Correspondent:
THOMAS FAHEY
NATIONAL CORPORATE RESEARCH, LTD.
1100 G STREET NW, SUITE 420
WASHINGTON, DC 20005

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