Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12959564
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Filing Dt:
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12/03/2010
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Publication #:
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Pub Dt:
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06/30/2011
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Inventors:
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Sungyong KO, Minshik KIM, Kwangmin LEE, Dongseok LEE, Weonmook LEE, Hwankook CHAE et al
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Title:
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APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4TH FL., 958-1, YOUNGTONG-DONG, YOUNGTONG-KU, |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF 443-810 |
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| IPLA P.A. |
| 3550 WILSHIRE BLVD. |
| 17TH FLOOR |
| LOS ANGELES, CA 90010 |
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