Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12712944
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Filing Dt:
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02/25/2010
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Publication #:
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Pub Dt:
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08/11/2011
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Inventors:
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Geun-Young Yeom, Woong-Sun Lim, Sang-Duk Park, Yi-Yeon Kim, Byoung-Jae Park, Je-Kwan Yeon
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Title:
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ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SUNGKYUNKWAN UNIVERSITY 300 |
| CHEONCHEON-DONG, JANGAN-GU, SUWON-SI |
| GYEONGGI-DO, KOREA, DEMOCRATIC PEOPLE'S REPUBLIC OF 440-746 |
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| JONATHAN P. OSHA |
| 909 FANNIN STREET, SUITE 3500 |
| HOUSTON, TX 77010 |
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