Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/06/2015
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Application #:
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13128630
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Filing Dt:
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05/10/2011
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Publication #:
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Pub Dt:
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09/15/2011
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PCT #:
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US0963798
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Inventors:
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Jun Ye, Yu Cao, Hanying Feng, Wenjin Shao
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Title:
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METHODS AND SYSTEMS FOR PARAMETER-SENSITIVE AND ORTHOGONAL GAUGE DESIGN FOR LITHOGRAPHY CALIBRATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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