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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
NONE
Issue Dt:
Application #:
13117488
Filing Dt:
05/27/2011
Publication #:
Pub Dt:
09/22/2011
Inventors:
Ivan L. Berry, Carlo Waldfried, Shijian Luo, Orlando Escorcia
Title:
PLASMA MEDIATED ASHING PROCESSES
Assignment: 1
Reel/Frame:
026353/0946Recorded: 05/27/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/24/2011
Exec Dt:
05/25/2011
Exec Dt:
05/24/2011
Exec Dt:
05/24/2011
Assignee:
108 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondent:
CANTOR COLBURN LLP
20 CHURCH STREET
22ND FLOOR
HARTFORD, CT 06103
Assignment: 2
Reel/Frame:
027824/0767Recorded: 03/07/2012Pages: 8
Conveyance:
SECOND AMENDMENT TO IPSA
Assignor:
Exec Dt:
03/05/2012
Assignee:
3003 TASMAN DRIVE
HG 150
SANTA CLARA, CALIFORNIA 02466
Correspondent:
CORPORATION SERVICE COMPANY
1090 VERMONT AVENUE NW, SUITE 430
WASHINGTON, DC 20005
Assignment: 3
Reel/Frame:
029529/0757Recorded: 12/21/2012Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
12/03/2012
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303
Assignment: 4
Reel/Frame:
030302/0719Recorded: 04/16/2013Pages: 7
Conveyance:
TERMINATION OF SECURITY AGREEMENT
Assignor:
Exec Dt:
04/11/2013
Assignee:
108 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01905
Correspondent:
THOMAS FAHEY
NATIONAL CORPORATE RESEARCH, LTD.
1100 G STREET NW, SUITE 420
WASHINGTON, DC 20005

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