Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13129607
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Filing Dt:
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06/20/2011
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Publication #:
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Pub Dt:
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10/06/2011
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Inventors:
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Nobuyuki Okayama, Naoki Matsumoto
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, |
| MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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| TUROCY & WATSON, LLP |
| 57TH FLOOR, KEY TOWER |
| 127 PUBLIC SQUARE |
| CLEVELAND, OH 44114 |
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