Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/26/2014
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Application #:
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13081190
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Filing Dt:
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04/06/2011
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Publication #:
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Pub Dt:
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10/13/2011
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Inventors:
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Franciscus Johannes Joseph JANSSEN, Erik Roelof Loopstra
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Title:
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METHOD OF COOLING AN OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING A DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| ALLISON H. DOUGLAS |
| 1650 TYSONS BOULEVARD, SUITE 1400 |
| MCLEAN, VA 22102 |
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