Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13022979
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Filing Dt:
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02/08/2011
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Publication #:
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Pub Dt:
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12/01/2011
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Inventors:
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Tomoatsu ISHIBASHI, Takahiro OGAWA, Kenichi SUGITA, Shinji KAJITA, Koichi FUKAYA et al
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Title:
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SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PROGRAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN 144-8510 |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| 1030 15TH STREET, N.W. |
| SUITE 400 EAST |
| WASHINGTON, DC 20005 |
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