Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/02/2013
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Application #:
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13115578
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Filing Dt:
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05/25/2011
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Publication #:
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Pub Dt:
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12/01/2011
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Inventors:
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Yushin TAKASAWA, Yoshiro HIROSE, Hajime KARASAWA
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| VOLPE AND KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| UNITED PLAZA |
| PHILADELPHIA, PA 19103 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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| MORGAN, LEWIS & BOCKIUS LLP |
| 1400 PAGE MILL ROAD |
| PALO ALTO, CA 94304 |
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