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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8920564
Issue Dt:
12/30/2014
Application #:
13169373
Filing Dt:
06/27/2011
Publication #:
20120003388
Pub Dt:
01/05/2012
Inventors:
GWO-CHUAN TZU, XIAOXIONG YUAN, AMIT KHANDELWAL, BENJAMIN CHENG WANG et al
Title:
METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH VARIABLE TEMPERATURE CAPABILITY
Assignment: 1
Reel/Frame:
026681/0195Recorded: 08/01/2011Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TZU, GWO-CHUAN
Exec Dt:
06/29/2011
YUAN, XIAOXIONG
Exec Dt:
06/29/2011
KHANDELWAL, AMIT
Exec Dt:
06/29/2011
WANG, BENJAMIN CHENG
Exec Dt:
06/29/2011
GELATOS, AVGERINOS
Exec Dt:
07/06/2011
WU, KAI
Exec Dt:
06/29/2011
KARAZIM, MICHAEL P.
Exec Dt:
06/29/2011
LIN, JING
Exec Dt:
07/21/2011
CUVALCI, OLKAN
Exec Dt:
06/29/2011
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
ALAN TABOADA
1030 BROAD STREET
SUITE 203
SHREWSBURY, NJ 07702

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