Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12831731
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Filing Dt:
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07/07/2010
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Publication #:
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Pub Dt:
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01/12/2012
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Inventors:
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Dongsuh Lee, Weijie Wang, Sam H. Kim, Qunhua Wang, Beom Soo Park, Beom Soo Kim et al
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Title:
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PRECISE TEMPERATURE CONTROL FOR TEOS APPLICATION BY HEAT TRANSFER FLUID
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CALIFORNIA 95052 |
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ROBERT W. MULCAHY |
P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CA 95052 |
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