Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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13243429
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Filing Dt:
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09/23/2011
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Publication #:
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Pub Dt:
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02/09/2012
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Inventors:
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Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba et al
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Title:
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INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-1, SHIBAURA 1-CHOME, MINATO-KU, |
TOKYO, JAPAN |
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WENDEROTH, LIND & PONACK, L.L.P. |
1030 15TH STREET NW |
SUITE 400 EAST |
WASHINGTON, DC 20005 |
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