Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2013
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Application #:
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13258813
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Filing Dt:
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09/22/2011
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Publication #:
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Pub Dt:
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05/10/2012
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Inventors:
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Keitaro Sakamoto, Fumiyasu Nomura, Tsunenori Komori
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD OF PRODUCING AMORPHOUS SILICON THIN FILM USING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, NIHONBASHI-MUROMACHI 2-CHOME |
| CHUO-KU |
| TOKYO, JAPAN 1038666 |
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| JOSHUA L. COHEN |
| 1235 WESTLAKES DRIVE, SUITE 301 |
| RATNERPRESTIA |
| BERWYN, PA 19312 |
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