Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/07/2014
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Application #:
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13079143
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Filing Dt:
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04/04/2011
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Publication #:
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Pub Dt:
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05/17/2012
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Inventors:
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An Andrew Zeng, Shouhong Tang, Steve Cui
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Title:
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METHOD AND APPAATUS FOR IMPROVING THE TEMPERATURE STABILITY AND MINIMIZING THE NOISE OF THE ENVIRONMENT THAT ENCLOSES AN INTERFEROMETRIC MEASURING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| DEBORAH WENOCUR/KLA TENCOR |
| 4057 AMARANTA AVENUE |
| PALO ALTO, CA 94306 |
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