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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/22/2015
Application #:
13294057
Filing Dt:
11/10/2011
Publication #:
Pub Dt:
05/17/2012
Inventors:
Hendrik Jan Hidde SMILDE, Arno Jan BLEEKER, Willem Marie Julia Marcel COENE et al
Title:
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
Assignment: 1
Reel/Frame:
027564/0505Recorded: 01/20/2012Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/04/2012
Exec Dt:
01/09/2012
Exec Dt:
01/11/2012
Exec Dt:
01/10/2012
Exec Dt:
01/02/2012
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS NL - 5504 DR
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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