Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/06/2014
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Application #:
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13079369
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Filing Dt:
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04/04/2011
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Publication #:
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Pub Dt:
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10/04/2012
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Inventors:
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Anthony Renau, Ludovic Godet, Timothy J. Miller, Joseph C. Olson
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Title:
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APPARATUS AND METHOD FOR MULTIPLE SLOT ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930-2297 |
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