Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13436338
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Filing Dt:
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03/30/2012
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Publication #:
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Pub Dt:
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10/04/2012
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Inventors:
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Axel DOCHNAHL, Dirk Heinrich EHM, Gisela VON BLANCKENHAGEN
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Title:
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REFLECTIVE OPTICAL ELEMENT AND METHOD FOR OPERATING AN EUV LITHOGRAPHY APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| GEORGE F. LEHNIGK |
| 2100 PENNSYLVANIA AVE, NW |
| SUITE 800 |
| WASHINGTON, DC 20035 |
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