Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2016
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Application #:
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13419625
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Filing Dt:
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03/14/2012
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Publication #:
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Pub Dt:
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10/04/2012
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Inventors:
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Mukul Khosla, Ronald Powell, Richard Blank, Arun Keshavamurthy
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Title:
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SYSTEMS AND METHODS FOR INHIBITING OXIDE GROWTH IN SUBSTRATE HANDLER VACUUM CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 N. FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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