Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/19/2016
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Application #:
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13442123
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Filing Dt:
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04/09/2012
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Publication #:
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Pub Dt:
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10/11/2012
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Inventor:
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Tokutarou HAYASHI
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Title:
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SUBSTRATE TRANSPORT METHOD, SUBSTRATE TRANSPORT APPARATUS, AND COATING AND DEVELOPING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| BURR & BROWN |
| PO BOX 7068 |
| SYRACUSE, NY 13261-7068 |
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