Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/11/2013
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Application #:
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13081692
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Filing Dt:
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04/07/2011
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Publication #:
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Pub Dt:
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10/11/2012
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Inventors:
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Ludovic Godet, Christopher R. Hatem, Patrick M. Martin, Timothy J. Miller
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Title:
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METHOD AND SYSTEM FOR POST-ETCH TREATMENT OF PATTERNED SUBSTRATE FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930-2297 |
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