Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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07/19/2016
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Application #:
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13453986
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Filing Dt:
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04/23/2012
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Publication #:
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Pub Dt:
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10/25/2012
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Inventors:
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Guido De Boer, Niels Vergeer
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Title:
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POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HAVING A PARTIALLY REFLECTIVE POSITION MARK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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COMPUTERLAAN 15 |
DELFT, NETHERLANDS 2628 XK |
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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP |
1279 OAKMEAD PARKWAY |
SUNNYVALE, CA 94085-4040 |
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Assignment:
2
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COURT APPOINTMENT (SEE DOCUMENT FOR DETAILS).
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POORTWEG 6C |
PA DELFT, NETHERLANDS 2612 |
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FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
901 NEW YORK AVENUE NW |
WASHINGTON, DC 20001 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
DR VELDHOVEN, NETHERLANDS 5504 |
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FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER LLP |
901 NEW YORK AVENUE NW |
WASHINGTON, DC 20001 |
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