Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/2013
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Application #:
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13520993
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Filing Dt:
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07/06/2012
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Publication #:
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Pub Dt:
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11/08/2012
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Inventors:
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Wilbert Jan Mestrom, Erik Roelof Loopstra, Erik Petrus Buurman et al
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Title:
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EUV RADIATION SOURCE COMPRISING A DROPLET ACCELERATOR AND LITHOGRAPHIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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