Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13298574
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Filing Dt:
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11/17/2011
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Publication #:
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Pub Dt:
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11/22/2012
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Inventors:
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Ce Ma, Qing Min Wang, Patrick J. Helly, Richard Hogle
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Title:
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METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC LAYER DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KLOSTERHOFSTR. 1 |
| MUNICH, GERMANY 80331 |
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| DAVID A. HEY |
| LINDE NORTH AMERICA, INC. |
| 575 MOUNTAIN AVE. |
| MURRAY HILL, NJ 07974 |
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