Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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13478888
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Filing Dt:
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05/23/2012
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Publication #:
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Pub Dt:
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11/29/2012
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Inventors:
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Han-Kwang NIENHUYS, Franciscus Johannes Joseph JANSSEN, Sven PEKELDER et al
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Title:
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LITHOGRAPHIC APPARATUS AND COMPONENT WITH REPEATING
STRUCTURE HAVING INCREASED THERMAL ACCOMMODATION COEFFICIENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL-5504 DR |
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ALLISON H. DOUGLAS |
1650 TYSONS BOULEVARD, SUITE 1400 |
MCLEAN, VA 22102 |
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