Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13339404
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Filing Dt:
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12/29/2011
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Publication #:
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Pub Dt:
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11/29/2012
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Inventors:
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Chunsheng ZHENG, Wenguang ZHANG, Qiang XU, Yuwen CHEN
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Title:
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METHOD FOR PREPARING A SHALLOW TRENCH ISOLATION STRUCTURE WITH THE STRESS OF ITS ISOLATION OXIDE BEING TUNED BY ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 497 GAO SI ROAD |
| ZHANGJIANG HI-TECH PARK, PUDONG |
| SHANGHAI, CHINA 201203 |
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| NEIL A. DUCHEZ |
| 1621 EUCLID AVENUE |
| 19TH FLOOR |
| CLEVELAND, OH 44115 |
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