Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/05/2016
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Application #:
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13586721
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Filing Dt:
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08/15/2012
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Publication #:
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Pub Dt:
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12/06/2012
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Inventors:
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Tomonori Kawasaki, Kazuaki Kozasa
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Title:
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ETCHING METHOD AND ETCHING APPARATUS OF SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1324-2 MASURAGAHARA-MACHI |
OMURA-SHI, NAGASAKI 856-8555, JAPAN |
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ALSTON & BIRD LLP/CORY C. DAVIS |
101 SOUTH TRYON STREET |
CHARLOTTE, GA 28280 |
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