Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13625489
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Filing Dt:
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09/24/2012
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Publication #:
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Pub Dt:
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04/25/2013
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Inventors:
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Tom Stevenson, Hong Shih, Robert G. O'Neill, Tae Won Kim, Raphael Casaes, Yan Fang
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Title:
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COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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BUCHANAN, INGERSOLL & ROONEY PC |
POST OFFICE BOX 1404 |
ALEXANDRIA, VA 22313-1404 |
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05/21/2024 01:15 PM
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