Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/2017
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Application #:
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13639037
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Filing Dt:
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12/17/2012
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Publication #:
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Pub Dt:
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05/23/2013
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Inventors:
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Hideki Komatsuda, Yoshio Kawabe
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Title:
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LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ILLUMINATING METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING OPTICAL APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12-1, YURAKUCHO, 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| STAAS & HALSEY LLP |
| ATTENTION: DAVID M. PITCHER |
| 1201 NEW YORK AVE., N.W., 7TH FLOOR |
| WASHINGTON, D.C. 20005 |
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