Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2016
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Application #:
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13681744
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Filing Dt:
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11/20/2012
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Publication #:
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Pub Dt:
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05/30/2013
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Inventors:
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Shinji OKAZAKI, Hakaru MIZOGUCHI, Junichi FUJIMOTO, Takashi MATSUNAGA, Kouji KAKIZAKI et al
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Title:
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TWO-BEAM INTERFERENCE APPARATUS AND TWO-BEAM INTERFERENCE EXPOSURE SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 YOKOKURASHINDEN, OYAMA-SHI, |
| TOCHIGI, JAPAN 323-8558 |
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| IPUSA, P.L.L.C |
| 1054 31ST STREET, N.W. |
| SUITE 400 |
| WASHINGTON, DC 20007 |
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