Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/11/2013
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Application #:
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13313078
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Filing Dt:
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12/07/2011
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Publication #:
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Pub Dt:
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06/13/2013
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Inventors:
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Peter F. Kurunczi, Christopher J. Leavitt, Daniel Distaso, Timothy J. Miller
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Title:
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APPARATUS AND METHOD FOR CHARGE NEUTRALIZATION DURING PROCESSING OF A WORKPIECE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
35 DORY ROAD |
GLOUCESTER, MA 01930-2297 |
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