Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/01/2013
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Application #:
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13354969
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Filing Dt:
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01/20/2012
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Publication #:
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Pub Dt:
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07/25/2013
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Inventors:
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Ying ZHANG, Tien-Chih CHENG, Shu-Huei SUEN, Yu-Cheng LIU, Jian-Huah CHIOU
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Title:
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WAFER TRANSFER POD FOR REDUCING WAFER PARTICULATE CONTAMINATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300 |
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| LOWE HAUPTMAN HAM & BERNER, LLP (TSMC) |
| 1700 DIAGONAL ROAD, SUITE 300 |
| ALEXANDRIA, VA 22314 |
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