Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/25/2014
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Application #:
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13761189
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Filing Dt:
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02/07/2013
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Publication #:
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Pub Dt:
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08/15/2013
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Inventors:
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Natale M. Ceglio, Daniel STEARNS, Riccardo BINDA, Jacques KOOLS, Giuseppe VALSECCHI et al
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Title:
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Source-collector modules for EUV lithography employing a GIC mirror and a LPP source
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LOCALITA PASCOLO |
23842 BOSISIO PARINI (LC), ITALY |
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OPTICUS IP LAW, PLLC |
7791 ALISTER MACKENZIE DRIVE |
SARASOTA, FL 34240 |
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11/11/2024 09:35 PM
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