Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/16/2019
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Application #:
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13881593
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Filing Dt:
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04/25/2013
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Publication #:
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Pub Dt:
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08/22/2013
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Inventors:
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Kazuhiko Fukazawa, Yoshihiko Fujimori
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Title:
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INSPECTION APPARATUS, INSPECTION METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12-1, YURAKUCHO 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001-4413 |
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