Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/20/2015
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Application #:
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13857278
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Filing Dt:
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04/05/2013
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Publication #:
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Pub Dt:
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10/10/2013
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Inventors:
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Frank Chilese, Douglas Fowler, Daniel Wack
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Title:
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TEMPERATURE CONTROL IN EUV RETICLE INSPECTION TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| JOSHUA D. ISENBERG |
| 809 CORPORATE WAY |
| FREMONT, CA 94539 |
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