Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13457455
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Filing Dt:
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04/26/2012
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Publication #:
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Pub Dt:
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10/31/2013
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Inventors:
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Svetlana B. Radovanov, Bon-Woong Koo, Ludovic Godet, Timothy J. Miller
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Title:
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Plasma Potential Modulated ION Implantation Apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
35 DORY ROAD |
GLOUCESTER, MA 01930-2297 |
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