Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/08/2016
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Application #:
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13561377
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Filing Dt:
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07/30/2012
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Publication #:
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Pub Dt:
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01/30/2014
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Inventors:
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Chunhai Wang, Chunsheng Huang, Andrew An Zeng, Frederick Arnold Goodman, Shouhong Tang et al
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Title:
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METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AND/OR THICKNESS OF A LARGE AND THIN SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| KLA TENCOR CORP/SUITER SWANTZ PC LLO |
| 14301 FNB PARKWAY, SUITE 220 |
| OMAHA, NE 68154 |
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