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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13858633
Filing Dt:
04/08/2013
Publication #:
Pub Dt:
02/20/2014
Inventors:
Wen-Ping TSAI, Wei-Chen LI
Title:
Non-Contact Substrate Chuck and Vertical Type Substrate Supporting Apparatus Using the Same
Assignment: 1
Reel/Frame:
030172/0775Recorded: 04/08/2013Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/29/2013
Exec Dt:
03/29/2013
Assignee:
11F., NO. 208, RUIGUANG RD.,
NEIHU DISTRICT
TAIPEI CITY, TAIWAN 114
Correspondent:
MUNCY, GEISSLER, OLDS & LOWE, PLLC
4000 LEGATO ROAD
SUITE 310
FAIRFAX, VA 22033

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