Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/10/2016
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Application #:
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14010484
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Filing Dt:
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08/26/2013
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Publication #:
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Pub Dt:
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03/06/2014
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Inventors:
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Qiang Zhang, Yanwei Liu, Abdurrahman Sezginer
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Title:
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WAVE FRONT ABERRATION METROLOGY OF OPTICS OF EUV MASK INSPECTION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| KWAN & OLYNICK LLP |
| 2000 HEARST AVENUE, SUITE 305 |
| BERKELEY, CA 94709 |
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