Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13609180
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Filing Dt:
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09/10/2012
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Publication #:
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Pub Dt:
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03/13/2014
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Inventors:
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Kyle Petersen, Jae Yeol Park, Michael Nam, David Gunther
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Title:
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TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1980 TAROB COURT |
| MILPITAS, CALIFORNIA 95035 |
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| KOKKA & BACKUS, PC |
| ATTN: KENNETH R. BACKUS, JR. |
| 703 HIGH STREET |
| PALO ALTO, CA 94301 |
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