Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13654303
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Filing Dt:
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10/17/2012
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Publication #:
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Pub Dt:
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03/13/2014
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Inventors:
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Abhishek Manohar, Raashina Humayun, Yan Guan, Panya Wongsenakhum
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Title:
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METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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