Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/10/2015
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Application #:
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13726409
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Filing Dt:
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12/24/2012
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Publication #:
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Pub Dt:
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05/01/2014
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Inventors:
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Deh-Ming Shyu, Yi-Sha Ku
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Title:
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Method and System for Measuring a Stacking Overlay Error by Focusing on One of Upper and Lower Layer Overlay Marks Using a Differential Interference Contrast Microscope
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 195, SEC. 4, CHUNG HSING RD. |
CHUTUNG |
HSINCHU, TAIWAN 31040 |
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LIN & ASSOCIATES INTELLECTUAL PROPERTY, |
PO BOX 2339 |
SARATOGA, CA 95070-0339 |
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