Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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14108727
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Filing Dt:
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12/17/2013
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Publication #:
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Pub Dt:
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06/26/2014
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Inventors:
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Sven Walter PROBST, Mohamad Hussein EL-HUSSEINI, Takahiro HIRAOKA
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Title:
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Method of Calibrating a DPP-Generated EUV Light Source
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 15 STEINBACHSTRASSE |
| AACHEN, GERMANY 52074 |
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| MARIA M. ELISEEVA |
| PATENTBAR INTERNATIONAL, P.C. |
| 1087 BEACON STREET, SUITE 303 |
| NEWTON, MA 02459 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-6-1, OTE-MACHI, CHIYODA-KU |
| TOKYO-TO, JAPAN |
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| MARIA M. ELISEEVA |
| PATENTBAR INTERNATIONAL, P.C. |
| 1087 BEACON STREET, SUITE 303 |
| NEWTON, MA 02459 |
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