Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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14227784
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Filing Dt:
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03/27/2014
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Publication #:
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Pub Dt:
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07/31/2014
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Inventors:
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Gisela von BLANCKENHAGEN, Dirk Heinrich EHM
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Title:
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EUV MIRROR COMPRISING AN OXYNITRIDE CAPPING LAYER HAVING A STABLE COMPOSITION, EUV LITHOGRAPHY APPARATUS, AND OPERATING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| GEORGE F. LEHNIGK |
| 9801 WASHINGTONIAN BLVD. |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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